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Design and fabrication of film bulk acoustic wave resonator

Other Titles

압전박막공진기 설계 및 제작

Authors

KIM IN TAY; 박윤권; 김용국; LEE YUN HI; Lee Jeon Kook; 김남수; Ju Byeong Kwon

Citation

SENSORS CONFERENCE 2002, pp.48 - 51

Keywords

Flexible MEMS; thin wafer; FBAR

URI

https://pubs.kist.re.kr/handle/201004/107214

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KIST Conference Paper > Others

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