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Evaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers in manufacturing line by home-built thermal desorption and P&T GC-MS

Authors

PARK HYUN MEE; KIM YOUNG MAN; Ryu Jae Chun; Cheong Chan Seong; 이대운; LEE KANG BONG

Citation

2001 Asianalyisis VI Conference Abstract

URI

https://pubs.kist.re.kr/handle/201004/107483

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KIST Conference Paper > Others

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