KIST Library Institutional Repository

Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃

Authors

심현상; 김동준; Kim Yong Tae; 전형탁; PARK YOUNG KYUN; Kim Seong Il

Citation

The International Conference on Electrical Engineering 2000, pp.774 - 777

Keywords

cyclic exposure

URI

https://pubs.kist.re.kr/handle/201004/108365

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML