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A new type thin film bulk acoustic resonator(TFR) using surface micromachining technique

Other Titles

표면 마이크로머시닝 기술을 사용한 새로운 형태의 압전박막공진기

Authors

김현호; 이시형; Ju Byeong Kwon; Lee Jeon Kook; OH MYUNG HWAN; KIM SOO WON

Citation

제2회 MEMS학술대회, pp.173 - 178

Keywords

thin film resonator; TMAH; surface micromachining; Piezoelectric; AIN

URI

https://pubs.kist.re.kr/handle/201004/108565

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KIST Conference Paper > Others

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