Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application

Other Titles
초전형 적외선 센서 제작을 위한 PZT박막 형성 및 식각 특성 평가
Authors
박윤권Ju Byeong Kwon전호승Yoon Young SooOh Young-JeiLEE YUN HISUH SANG HEEOH MYUNG HWAN김철주
Citation
1999년도 대한전기학회 하계학술대회 논문집, pp.3304 - 3306
Keywords
pyroelectric sensor; PZT film; MEMSS; micromachining
URI
https://pubs.kist.re.kr/handle/201004/109130
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KIST Conference Paper > Others
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