KIST Library Institutional Repository

Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application

Other Titles

초전형 적외선 센서 제작을 위한 PZT박막 형성 및 식각 특성 평가

Authors

박윤권; Ju Byeong Kwon; 전호승; Yoon Young Soo; Oh Young-Jei; LEE YUN HI; SUH SANG HEE; OH MYUNG HWAN; 김철주

Citation

1999년도 대한전기학회 하계학술대회 논문집, pp.3304 - 3306

Keywords

pyroelectric sensor; PZT film; MEMSS; micromachining

URI

https://pubs.kist.re.kr/handle/201004/109130

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML