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Other Titles

시변환 쉬스 거동에 대한 탐침 전류 곡선의 해석

Authors

김영우; 조정희; LIM HYUN EUI; HAN SEUNG HEE; LEE YEON HEE; 김곤호

Citation

제 17 회 한국진공학회, pp.222

Keywords

plasma source ion implantation

URI

https://pubs.kist.re.kr/handle/201004/109146

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KIST Conference Paper > Others

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