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A study on fabrication of piezoresistive pressure sensor based on poly-Si

Other Titles

벌크 마이크로 머쉬닝에 의한 다결정 실리콘 압력센서 제작 관한 연구

Authors

임재홍; PARK YONG-WOOK; YOON SEOK JIN; 정형진; Yoon Young Soo

Citation

한국전기전자재료학회 '99 춘계학술대회 논문집, pp.677 - 680

Keywords

piezoresistivity; poly-crystalline silicon; pressure sensor; diaphragm thickness

URI

https://pubs.kist.re.kr/handle/201004/109278

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KIST Conference Paper > Others

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