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Micro-tunneling sensor for vacuum level evaluation of field emission display

Authors

박흥우; Ju Byeong Kwon; 박윤권; 김철주; OH MYUNG HWAN

Citation

1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference, pp.255 - 258

Keywords

FEA; FED; MEMS; poly-Si emitter; vacuum sensor; cantilver; field emission; lift-off

URI

https://pubs.kist.re.kr/handle/201004/109322

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KIST Conference Paper > Others

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