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A modeling of electrostatic capacitance and moving force in comb actuator for controlling a micro-optical switch

Other Titles

초소형 광스위치 제어를 위한 comb 액츄에이터에서의 정전용량과 구동력 모델링

Authors

채경수; Moon Sung Wook; OH MYUNG HWAN; PARK YOUNG KYUN; Kim Seong Il; PARK JEONG HO

Citation

센서학회지, v.10, no.1, pp.193 - 197

Keywords

초소형 광스위치

URI

https://pubs.kist.re.kr/handle/201004/109535

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KIST Conference Paper > Others

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