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Etching-bonding-thin film deposition process for MEMS-IR SENSOR application

Other Titles

MEMS-IR SENSOR 용 식각 - 접합 - 박막증착 기반공정

Authors

박윤권; Ju Byeong Kwon; 박흥우; PARK JEONG HO; Sang-Seop Yom; SUH SANG HEE; OH MYUNG HWAN; 김철주

Citation

대한전기학회 하계학술대회, pp.?

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/110031

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KIST Conference Paper > Others

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