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Silicon-to-silicon electrostatic bonding using lithia-silicate glass interlayer

Other Titles

리튬이 도핑된 박막을 이용한 실리콘 정전 열 접합

Authors

정지원; Ju Byeong Kwon; CHOI DOO JIN; OH MYUNG HWAN

Citation

한국요업학회 춘계연구발표회, pp.92

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/110215

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KIST Conference Paper > Others

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