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Substrate-removed (SURE) optical waveguides in GaAs/AlGaAs epitaxial layers embedded in benzocyclobutene (BCB)

Authors

Steven R. Sakamoto; Cem Ozturk; Byun Young Tae; Jack Ko; Nadir Dagli

Citation

Integrated Photonics Research 1998 : Technical Digest Series, v.4, pp.79 - 81

Keywords

SUR optical waveguides; benzocyclobutene; Gats substrate set spray etch; propagation loss

URI

https://pubs.kist.re.kr/handle/201004/110231

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KIST Conference Paper > Others

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