KIST Library Institutional Repository

Fabrication processes and characteristics of microelectromechanical system using PZT films

Authors

Yoon Young Soo; Joon Han Kim; T.H. Lim; U.A. Bonne; A.M. Schmidt; D.L. Polla

Citation

Mat. Res. Soc. Symp. Proc., v.444, pp.143 - 148

Keywords

MEMS; PZT film; micromaching

URI

https://pubs.kist.re.kr/handle/201004/111244

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML