KIST Library Institutional Repository

Particle deposition velocities on a rotating wafer

Authors

안강호; Bae Gwi-Nam; Chun-Sik Lee

Citation

Proceedings of the 13th international symposium on contamination control., pp.465 - 469

Keywords

particle deposition velocity; rotating wafer; rotatingspeed

URI

https://pubs.kist.re.kr/handle/201004/111344

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML