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Enhancement of lateral growth rate during MOCVD growth on patterned GaAs substrates with CBr//4.

Authors

KIM EUN KYU; S.I. Kim; M.S. Kim; Y. Kim; S.M. Hwang; B.D. Min; C.S. Son; Min Suk-Ki

Citation

Digest of Papers on the 9th Int'l Micro-process Conference., pp.116 - 169

Keywords

lateral growth rate

URI

https://pubs.kist.re.kr/handle/201004/111381

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KIST Conference Paper > Others

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