KIST Library Institutional Repository

An assembly and interconnection technology for micromechanical structure using a anisotropic conductive film

Authors

I. B. Kang; Ju Byeong Kwon; M. R. Haskard

Citation

SPIE 1996 symp. micromachining and microfabrication, Austin, Texas., pp.?

Keywords

MEMS; micromachining; wafer bonding

URI

https://pubs.kist.re.kr/handle/201004/111527

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML