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Low temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method

Authors

Kim Tae Song; Dong-Joo Kim; Lee Jeon Kook; 정형진

Citation

Ferroelectric thin films V, Mat. res. soc. symp. proc., v.433, pp.243 - 247

Keywords

non-volatile memory; PZT; sputtering process; Ferroelectric thin films

URI

https://pubs.kist.re.kr/handle/201004/111629

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KIST Conference Paper > Others

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