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Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4.

Authors

KIM YOUN; KIM MOO SUNG; Kim Seong Il; 황성민; KANG JOON MO; 박양근; Min Suk-Ki

Citation

The 1st inter. conf. on low dimensional structures and devices, pp.27 - ?

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/111984

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KIST Conference Paper > Others

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