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A study on the particle deposition toward a rotating wafer surface.

Other Titles

회전 웨이퍼상의 입자침착에 관한 연구 =

Authors

Bae Gwi-Nam; 안강호

Citation

대한기계학회 1995 년도 추계학술대회논문집 (II)., pp.350 - 354

Keywords

particle deposition; 입자침착; 회전웨이퍼; 입자침착속도; 회전속도

URI

https://pubs.kist.re.kr/handle/201004/112017

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KIST Conference Paper > Others

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