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Thermally stable, deep UV resist materials

Authors

S. R. Turner; Ahn Kwang-Duk; C. G. Willson

Publisher

American Chemical Society

Citation

Polymeric materials : science and engineering, proceedings of the ACS Division of Polymeric Materials, Science and Engineering, v.55, pp.608 - 609

ISSN

0743-0515

URI

https://pubs.kist.re.kr/handle/201004/112822

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KIST Conference Paper > Others

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