3D MEMS antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique

Abstract

This paper describes the novel UV-Lithography technique for fabrication of 3D feed horn mold structure array using implementation of mirror reflected parallel beam illuminator (MRPBI) system, fabrication of 3D feed horn MEMS antenna's plate using plastic micromachining (PMM) by Polydimethylsiloxane (PDMS) and the 3D MEMS antenna array are assembled using novel 3D MEMS bonding technique by mesh structure bonding (MSB) method.