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Characteristics of excimer-laser-crystallized polysilicon films by line beam scanning method

Authors

Jhon, YM; Kim, DH; Chu, H; Lee, CW; Choi, SS

Issue Date

1995

Publisher

MATERIALS RESEARCH SOC

Citation

Symposium on Beam-Solid Interactions for Materials Synthesis and Characterization, at the 1994 MRS Fall Meeting, v.354, pp.647 - 652

ISSN

0272-9172

URI

https://pubs.kist.re.kr/handle/201004/119054

Appears in Collections:

KIST Conference Paper > Others

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