Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation

Abstract

We propose a new flexible piezoelectric micromachined ultrasonic transducer (pMUT) array integrated on flexible polydimethylsiloxane (PDMS) that can be used in studying brain stimulation by ultrasound. To achieve the technical demands of a high sound pressure level and flexibility, a diaphragm-type piezoelectric ultrasound transducer array was manufactured with 55 mu m-thick bulk lead zirconate titanate (PZT) that was thinned after bonding with a silicon wafer. The ultrasound transducer array was then strongly bonded onto a PDMS substrate using an oxygen-plasma treatment followed by precise dicing with a fixed pitch to achieve flexibility. The radius of curvature was smaller than 5 mm, which is sufficient for attachment to the surface of a mouse brain. After a thinning process for the PZT layer, we observed that the PZT layer still maintained a high ferroelectric property. The measured remnant polarization (P-r) and coercive field (E-c) were 28.26 mu C/cm(2) and 79 kV/cm, respectively. The resonant frequencies of fabricated pMUT elements with different membrane sizes of 700, 800, 900, 1200 mu m in diameter were measured to be 694.4, 565.4, 430.8, and 289.3 kHz, respectively. By measuring the ultrasound output pressure, a pMUT showed a sound intensity (I-sppa) of 44 mW/cm(2) at 80 V, which is high enough for low-intensity ultrasound brain stimulation.