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반도체 제조공정용 탄화규소 부품/소재 기술

Authors

박상환; 이동윤; 한재호; 윤성호; 조경선

Issue Date

2007-08

Citation

세라미스트, v.10, no.4, pp.38 - 53

Keywords

반도체 공정; 탄화규소

ISSN

1226-976X

URI

https://pubs.kist.re.kr/handle/201004/134216

Appears in Collections:

KIST Article > 2007

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