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Deposition of LiNbO3 thin films for selective etching

Authors
Kim, Hyun-Jun; Kim, Dal-Young; Ha, Jong-Yoon; Kang, Chong-Yun; Sung, Man Young; Cho, Bong Hee; Yoon, Seok-Jin; Kim, Hyun-Jai
Issue Date
2006-12
Publisher
SPRINGER
Citation
JOURNAL OF ELECTROCERAMICS, v.17, no.2-4, pp.933 - 935
Abstract
Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).
Keywords
PULSED-LASER DEPOSITION; LITHIUM-NIOBATE; EPITAXIAL-GROWTH; PULSED-LASER DEPOSITION; LITHIUM-NIOBATE; EPITAXIAL-GROWTH; ferroelectric; selective etching; LiNbO3; PLD
ISSN
1385-3449
URI
https://pubs.kist.re.kr/handle/201004/134905
DOI
10.1007/s10832-006-0467-z
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KIST Article > 2006
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