Effects of annealing conditions on the crystallization and grain growth of metastable Ge2Sb2Te5
- Authors
- Park, YJ; Lee, JY; Youm, MS; Kim, YT
- Issue Date
- 2005-01
- Publisher
- JAPAN SOC APPLIED PHYSICS
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.44, no.1A, pp.326 - 327
- Abstract
- The Ge2Sb2Te5 thin films deposited by a sputtering method on a SiO2/Si substrate were annealed. and subjected to transmission electron microscopy in order to investigate the crystallization and growth of the metastable Ge2Sb2Te5. The metastable Ge2Sb2Te5 was initially crystallized with 10-nm-sized grains and its sheet resistance was still as high as in the amorphous state. Sheet resistance was abruptly decreased at the grain growth stage after the crystallization.
- Keywords
- THIN-FILMS; CRYSTAL NUCLEATION; MICROSCOPY; THIN-FILMS; CRYSTAL NUCLEATION; MICROSCOPY; Ge2Sb2Te5; TEM; rapid thermal annealing; crystallization; grain growth
- ISSN
- 0021-4922
- URI
- https://pubs.kist.re.kr/handle/201004/136883
- DOI
- 10.1143/JJAP.44.326
- Appears in Collections:
- KIST Article > 2005
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