DSpace at KISTKIST Article2003

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dc.contributor.author강유리-
dc.contributor.author김용국-
dc.contributor.author김수원-
dc.contributor.author주병권-
dc.date.accessioned2024-01-21T07:44:39Z-
dc.date.available2024-01-21T07:44:39Z-
dc.date.created2022-01-10-
dc.date.issued2003-12-
dc.identifier.issn1226-7945-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138021-
dc.languageKorean-
dc.publisher한국전기전자재료학회-
dc.titleFlexible 마이크로시스템을 위한 압전 박막 공진기의 설계 및 제작-
dc.title.alternativeDesign and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기전자재료학회논문지, v.16, no.12S-
dc.citation.title전기전자재료학회논문지-
dc.citation.volume16-
dc.citation.number12S-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001001420-
dc.subject.keywordAuthorFBAR-
dc.subject.keywordAuthorFlexible microsystems-
dc.subject.keywordAuthorThin wafer-
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KIST Article > 2003
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