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Flexible 마이크로시스템을 위한 압전 박막 공진기의 설계 및 제작

Other Titles

Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

Authors

강유리; 김용국; 김수원; 주병권

Issue Date

2003-12

Publisher

한국전기전자재료학회

Citation

전기전자재료학회논문지, v.16, no.12S

Keywords

FBAR; Flexible microsystems; Thin wafer

ISSN

1226-7945

URI

https://pubs.kist.re.kr/handle/201004/138021

Appears in Collections:

KIST Article > 2003

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