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Experimental study of hydrogen-ion implantation for SOI fabrication

Other Titles

SOI 제작을 위한 수소 이온 주입에 대한 실험적 고찰

Authors

변영태; 김형권; 김태곤

Issue Date

2003-10

Citation

새물리, v.v. 47, no.no. 4, pp.266 - 272

Keywords

Smart-cut; 이온주입; 실리콘 절연체; SOI

URI

https://pubs.kist.re.kr/handle/201004/138162

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KIST Article > 2003

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