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실리콘 표면에 흡착된 수분층의 나노트라이볼로지 거동

Other Titles

Nanotribological Behavior of Adsorbed Water Layer on Silicon Surface

Authors

김두인; 안효석; 최동훈

Issue Date

2003-10

Publisher

한국트라이볼로지학회

Citation

한국트라이볼로지학회지, v.19, no.5, pp.245 - 250

Keywords

microsystem; humidity; adsorption layer; capillary force; shear stress

ISSN

2713-8011

URI

https://pubs.kist.re.kr/handle/201004/138176

Appears in Collections:

KIST Article > 2003

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