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Optical MEMS-MEMS 기술의 센서 응용 ( 비냉각형 적외선 이미지 소자를 중심으로 )

Authors

문성욱

Issue Date

2002-08

Citation

Semiconductor Monthly, v.174, pp.40 - 57

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/139304

Appears in Collections:

KIST Article > 2002

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