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dc.contributor.author박상하-
dc.contributor.author한승오-
dc.contributor.author박종연-
dc.contributor.author문성욱-
dc.contributor.author박정호-
dc.date.accessioned2024-01-21T10:43:56Z-
dc.date.available2024-01-21T10:43:56Z-
dc.date.created2022-01-10-
dc.date.issued2002-04-
dc.identifier.issn1229-246X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139631-
dc.languageKorean-
dc.publisher대한전기학회-
dc.title마이크로몰딩의 이형성 향상을 위한 소수성 Self-assembled Monolayer(SAM) 코팅-
dc.title.alternativeHydrophobic Self-assembled Monolayer(SAM) Coating for Enhanced Demolding Performance in Micromolding-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기학회논문지 C권, v.51, no.4, pp.175-
dc.citation.title전기학회논문지 C권-
dc.citation.volume51-
dc.citation.number4-
dc.citation.startPage175-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART000906210-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromolding-
dc.subject.keywordAuthoradhesion force-
dc.subject.keywordAuthorXPS-
dc.subject.keywordAuthorAFM-
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KIST Article > 2002
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