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마이크로몰딩의 이형성 향상을 위한 소수성 Self-assembled Monolayer(SAM) 코팅

Other Titles

Hydrophobic Self-assembled Monolayer(SAM) Coating for Enhanced Demolding Performance in Micromolding

Authors

박상하; 한승오; 박종연; 문성욱; 박정호

Issue Date

2002-04

Publisher

대한전기학회

Citation

전기학회논문지 C권, v.51, no.4, pp.175

Keywords

MEMS; micromolding; adhesion force; XPS; AFM

ISSN

1229-246X

URI

https://pubs.kist.re.kr/handle/201004/139631

Appears in Collections:

KIST Article > 2002

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