DSpace at KISTKIST Article2002

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dc.contributor.author한준희-
dc.contributor.author이광렬-
dc.contributor.author김광석-
dc.contributor.author이상율-
dc.date.accessioned2024-01-21T11:02:46Z-
dc.date.available2024-01-21T11:02:46Z-
dc.date.created2022-01-10-
dc.date.issued2002-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139706-
dc.titlePrincipal and applications of nanoindentation test-
dc.title.alternative나노 인덴테이션 시험의 원리 및 응용-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation한국정밀공학회지 = Journal of the Korean Society of Precision Engineering, v.19, no.3, pp.19 - 26-
dc.citation.title한국정밀공학회지 = Journal of the Korean Society of Precision Engineering-
dc.citation.volume19-
dc.citation.number3-
dc.citation.startPage19-
dc.citation.endPage26-
dc.subject.keywordAuthornanoindentation-
dc.subject.keywordAuthorthin film-
dc.subject.keywordAuthorhardness-
dc.subject.keywordAuthorelastic modulus-
dc.subject.keywordAuthorDLC-
dc.subject.keywordAuthorpolyimide-
dc.subject.keywordAuthorMEMS-
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