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Principal and applications of nanoindentation test

Other Titles

나노 인덴테이션 시험의 원리 및 응용

Authors

한준희; 이광렬; 김광석; 이상율

Issue Date

2002-03

Citation

한국정밀공학회지 = Journal of the Korean Society of Precision Engineering, v.19, no.3, pp.19 - 26

Keywords

nanoindentation; thin film; hardness; elastic modulus; DLC; polyimide; MEMS

URI

https://pubs.kist.re.kr/handle/201004/139706

Appears in Collections:

KIST Article > 2002

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