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dc.contributor.author조정-
dc.contributor.author나종범-
dc.contributor.author오민석-
dc.contributor.author윤기현-
dc.contributor.author정형진-
dc.contributor.author최원국-
dc.date.accessioned2024-01-21T11:37:01Z-
dc.date.available2024-01-21T11:37:01Z-
dc.date.created2022-01-10-
dc.date.issued2001-11-
dc.identifier.issn1225-8822-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140053-
dc.languageKorean-
dc.publisher한국진공학회-
dc.titleRF 마그네트론 스퍼터링 법으로 사파이어 기판 위에 성장시킨 ZnO : Ga 박막의 RTA 처리에 따른 photoluminescence 특성변화-
dc.title.alternativeEnhancement of photoluminescence and electrical properties of Ga doped ZnO thin film grown on α-Al₂O₃ (0001) single crystal substrate by RF magnetron sputtering through rapid thermal annealing-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회지, v.10, no.3, pp.335 - 340-
dc.citation.title한국진공학회지-
dc.citation.volume10-
dc.citation.number3-
dc.citation.startPage335-
dc.citation.endPage340-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
Appears in Collections:
KIST Article > 2001
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