Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조정 | - |
dc.contributor.author | 나종범 | - |
dc.contributor.author | 오민석 | - |
dc.contributor.author | 윤기현 | - |
dc.contributor.author | 정형진 | - |
dc.contributor.author | 최원국 | - |
dc.date.accessioned | 2024-01-21T11:37:01Z | - |
dc.date.available | 2024-01-21T11:37:01Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 2001-11 | - |
dc.identifier.issn | 1225-8822 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/140053 | - |
dc.language | Korean | - |
dc.publisher | 한국진공학회 | - |
dc.title | RF 마그네트론 스퍼터링 법으로 사파이어 기판 위에 성장시킨 ZnO : Ga 박막의 RTA 처리에 따른 photoluminescence 특성변화 | - |
dc.title.alternative | Enhancement of photoluminescence and electrical properties of Ga doped ZnO thin film grown on α-Al₂O₃ (0001) single crystal substrate by RF magnetron sputtering through rapid thermal annealing | - |
dc.type | Article | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 한국진공학회지, v.10, no.3, pp.335 - 340 | - |
dc.citation.title | 한국진공학회지 | - |
dc.citation.volume | 10 | - |
dc.citation.number | 3 | - |
dc.citation.startPage | 335 | - |
dc.citation.endPage | 340 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | other | - |
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