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RF 마그네트론 스퍼터링 법으로 사파이어 기판 위에 성장시킨 ZnO : Ga 박막의 RTA 처리에 따른 photoluminescence 특성변화

Other Titles

Enhancement of photoluminescence and electrical properties of Ga doped ZnO thin film grown on α-Al₂O₃ (0001) single crystal substrate by RF magnetron sputtering through rapid thermal annealing

Authors

조정; 나종범; 오민석; 윤기현; 정형진; 최원국

Issue Date

2001-11

Publisher

한국진공학회

Citation

한국진공학회지, v.10, no.3, pp.335 - 340

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/140053

Appears in Collections:

KIST Article > 2001

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