KIST Library Institutional Repository

Residual stress evaluation through improved curvature method by considering plastic deformation effect of substrate in CVD diamond film

Other Titles

Si 기판의 소성변형 효과 보정에 의해 개선된 곡률측정법을 이용한 CVD 다이아몬드 박막의 잔류응력 평가

Authors

정증현; 김용협; 백영준; 권동일

Issue Date

2000-12

Publisher

대한금속.재료학회

Citation

대한금속 . 재료학회지 = Journal of the Korean Institute of Metals and Materials, v.38, no.12, pp.1675 - 1683

Keywords

Diamond film; Residual stress; Plastic deformation; Diamond etching; Nondiamond phase; Stress gradient

ISSN

1738-8228

URI

https://pubs.kist.re.kr/handle/201004/140883

Appears in Collections:

KIST Article > 2000

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML