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A study for the characteristics of multi-layer VOx thin films for applying to IR absorbing layer

Other Titles

적외선 흡수층 응용을 위한 다층 산화 바나듐 박막의 특성에 관한 연구

Authors

박철우; 문성욱; 오명환; 정홍배

Issue Date

2000-10

Publisher

한국전기전자재료학회

Citation

전기전자재료학회논문지, v.13, no.10, pp.859 - 864

Keywords

IR(infrared); MEMS; Microelectromechanical System; Microbolometer; TCR; Temperature coefficient of resistance

ISSN

1226-7945

URI

https://pubs.kist.re.kr/handle/201004/141057

Appears in Collections:

KIST Article > 2000

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