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Activation energy for the loss of substitutional carbon in Si0.984C0.016 grown by solid phase epitaxy

Authors

Yong Jenong Kim; Tae Joon Kim; Tae-Kyung Kim; Byungwoo Park; 송종한

Issue Date

2000-06

Publisher

한국진공학회

Citation

한국진공학회지, v.4, no.2, pp.50 - 54

Keywords

SPE; FTIR; HR-XRD; substitutional carbon; RTA

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/141311

Appears in Collections:

KIST Article > 2000

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