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Fabrication of micro-vacuum sensor using surface-macromachined lateral-type field emitter device

Other Titles

표면 미세 가공된 측면형 전계 방출 소자를 이용한 초소형 진공 센서의 제작

Authors

박흥우; 주병권; 이윤희; 박정호; 오명환

Issue Date

2000-05

Citation

한국센서학회, v.9, no.3, pp.182 - 189

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/141418

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KIST Article > 2000

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