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Si-to-Si electrostatic bonding using LSG film as an interlayer

Other Titles

LSG interlayer를 이용한 실리콘-실리콘 정전 열 접합

Authors

주병권; 정지원; 이덕중; 이윤희; 최두진; 오명환

Issue Date

1999-09

Publisher

大韓電氣學會

Citation

전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.48C, no.9, pp.672 - 675

Keywords

FED

ISSN

0254-4172

URI

https://pubs.kist.re.kr/handle/201004/141934

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KIST Article > Others

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