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이온빔 합성법에 의해 증착된 다이아몬드성 카본 필름의 구조 및 특성

Other Titles

Structure and properties of ion beam deposited diamond-like carbon films

Authors

김성화; 이광렬; 은광용

Issue Date

1999-08

Publisher

한국진공학회

Citation

한국진공학회지, v.8, no.3, pp.346 - 352

Keywords

DLC

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/142002

Appears in Collections:

KIST Article > Others

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