Characterization of Si3N4/SiC nanocomposite by Raman scattering and XPS

Abstract

We have synthesized Si3N4/SiC nanocomposites using a commercial polymer. The formed Si3N4/SiC nanocomposites have been studied using Raman scattering and X-ray photoelectron spectroscopy (WS). The Raman scattering measurements showed that the formation of SiC started at 1200 degrees C and that the main phase was 3C-SiC, The XPS results suggested that the SiC nanoparticles were formed by a chemical reaction of Si provided from Si3N4 with free carbon obtained by pyrolysis of polymer. The XPS results also indicated that residual carbon reacted with N-2 to form CNx, which remained as an impurity phase in the final product. (C) 1999 Elsevier Science S.A. All rights reserved.