Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices
- Other Titles
- 질소가 도핑된 DLC 막의 물성 조사 및 Mo-tip FEA 소자에의 응용
- Authors
- 주병권; 정재훈; 김훈; 이윤희; 이남양; 오명환
- Issue Date
- 1999-01
- Publisher
- 大韓電氣學會
- Citation
- 전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.48C, no.1, pp.18 - 22
- Keywords
- FED; field emission; Mo-tip FEA; DLC coating; N-doping; low-hydrogenated film; transconductance; electrical conductivity; optical band-gap
- ISSN
- 0254-4172
- URI
- https://pubs.kist.re.kr/handle/201004/142481
- Appears in Collections:
- KIST Article > Others
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