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Ceramic surface modification by a keV ion irradiation

Authors
Choi, WK; Choi, SC; Jung, HJ; Koh, SK
Issue Date
1999-01
Publisher
ELSEVIER SCIENCE BV
Citation
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, v.148, no.1-4, pp.740 - 744
Abstract
New functional complexes such as AlON and SiON were successfully formed by keV Ar+ ion irradiation with concurrent reactive pas blowing near the irradiated AlN and Si3N4 ceramic surfaces. Single crystal Al2O3 was also treated by only Nt bombardment. At energies higher than 500 eV, AlON bonding arose, while AlN bonds were formed at 1 keV irradiation. (C) 1999 Elsevier Science B.V. All rights reserved.
Keywords
ENERGY AR+ ION; OXYGEN ENVIRONMENT; POLYCARBONATE; ADHESION; POLYTETRAFLUOROETHYLENE; ALUMINUM; ENERGY AR+ ION; OXYGEN ENVIRONMENT; POLYCARBONATE; ADHESION; POLYTETRAFLUOROETHYLENE; ALUMINUM; keV ion beam; metal film adhesion; functional layer; ceramic surface modification
ISSN
0168-583X
URI
https://pubs.kist.re.kr/handle/201004/142605
DOI
10.1016/S0168-583X(98)00848-9
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