2D and 3D simulation of toroidal type thin film inductors

Abstract

There have been remarkable advances in semiconductor industry but the miniaturization of magnetic devices is progressed very slowly. So many studies are carried out overcoming the gap. To develop small size devices, proper design and property simulation of the devices are requested to spare the efforts before fabrication processes. However, there is a few of simulation studies have been reported. In this work, we fabricated thin film toroidal inductors using permalloy as a core material and measured the properties to estimate 2D and 3D simulation in the magnetic devices. The 3D simulation shows more agreeable results than the 2D simulation. On the other hand, when we changed core materials, the inductor using Fe-Hf-C-N nanocrystalline alloys as core material shows the better properties than using permalloy and Fe-Zr-C-N alloys.