Patterned diamond microcolumns for field emitter
- Authors
- Cho, H; Baik, YJ; Jeon, D
- Issue Date
- 1998-06
- Publisher
- ELSEVIER SCIENCE BV
- Citation
- ULTRAMICROSCOPY, v.73, no.1-4, pp.125 - 128
- Abstract
- We have fabricated an array of diamond microcolumns on a silicon substrate using the following process: Fine diamond crystallites were mixed in acetone and seeded on a silicon wafer using an ultrasonic shaker. A silicon oxide film was deposited on the silicon substrate, and an array of holes was formed in the oxide film by back-etching until the diamond-seeded substrate was exposed, Diamond was grown using chemical vapor deposition. Diamond grains grew from the diamond-seeded substrate and filled the holes in the oxide layer, resulting in the formation of an array of diamond microcolumns. (C) 1998 Elsevier Science B.V. All rights reserved.
- Keywords
- EMISSION; EMISSION; field emitter; diamond film
- ISSN
- 0304-3991
- URI
- https://pubs.kist.re.kr/handle/201004/143054
- DOI
- 10.1016/S0304-3991(97)00145-9
- Appears in Collections:
- KIST Article > Others
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.