Patterned diamond microcolumns for field emitter

Authors
Cho, HBaik, YJJeon, D
Issue Date
1998-06
Publisher
ELSEVIER SCIENCE BV
Citation
ULTRAMICROSCOPY, v.73, no.1-4, pp.125 - 128
Abstract
We have fabricated an array of diamond microcolumns on a silicon substrate using the following process: Fine diamond crystallites were mixed in acetone and seeded on a silicon wafer using an ultrasonic shaker. A silicon oxide film was deposited on the silicon substrate, and an array of holes was formed in the oxide film by back-etching until the diamond-seeded substrate was exposed, Diamond was grown using chemical vapor deposition. Diamond grains grew from the diamond-seeded substrate and filled the holes in the oxide layer, resulting in the formation of an array of diamond microcolumns. (C) 1998 Elsevier Science B.V. All rights reserved.
Keywords
EMISSION; EMISSION; field emitter; diamond film
ISSN
0304-3991
URI
https://pubs.kist.re.kr/handle/201004/143054
DOI
10.1016/S0304-3991(97)00145-9
Appears in Collections:
KIST Article > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE