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초전성 PZT 박막을 이용한 microelectromechanical system 소자의 제작

Authors

윤영수

Issue Date

1998-02

Citation

전기전자재료, v.11, no.2, pp.135 - 139

Keywords

초전송; PZT; 적외선 센서; MEMS

URI

https://pubs.kist.re.kr/handle/201004/143253

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KIST Article > Others

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