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dc.contributor.author조성진-
dc.contributor.author이광렬-
dc.contributor.author은광용-
dc.contributor.author한준희-
dc.contributor.author고대홍-
dc.date.accessioned2024-01-21T17:37:00Z-
dc.date.available2024-01-21T17:37:00Z-
dc.date.created2022-01-10-
dc.date.issued1998-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143350-
dc.titleEvaluation of elastic properties of DLC films using substrate etching techniques-
dc.title.alternative기판 etching 기법을 이용한 DLC 필름의 탄성특성 평가-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation요업학회지 = Journal of the Korean Ceramic Society, v.35, no.8, pp.813 - 818-
dc.citation.title요업학회지 = Journal of the Korean Ceramic Society-
dc.citation.volume35-
dc.citation.number8-
dc.citation.startPage813-
dc.citation.endPage818-
dc.subject.keywordAuthor다이아몬드상 카본-
dc.subject.keywordAuthor탄성계수-
dc.subject.keywordAuthor잔류응력-
dc.subject.keywordAuthorDLC films-
dc.subject.keywordAuthorelastic modulus-
dc.subject.keywordAuthorpoisson&apos-
dc.subject.keywordAuthors ratio-
dc.subject.keywordAuthornano-indenataion-
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